Capacitive Position Sensor for Nanopositioning – MicroSense Mini - Capacitive Position Sensors
MicroSense Mini is a precision linear position sensor which delivers nanometer level resolution over measurement ranges up to a millimeter. The Mini is ideal for short travel, precision positioning applications – providing position feedback in mechanisms such as piezo driven positioning stages, micro-actuators, and scanning probe microscope stages. Based on advanced capacitive sensing technology, the MicroSense Mini uses any grounded, conductive surface as a target – no linear scale or mirror is required – providing direct measurement of the moving target.
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