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Capacitive Position Sensor for Nanopositioning - MicroSense Mini

Capacitive Position Sensor for Nanopositioning - MicroSense Mini

The MicroSense Mini is a compact, high resolution linear displacement sensor designed specifically for providing servo system feedback, especially for OEM applications.

Features include:

  • High resolution non-contact position sensor – resolution to the sub-nanometer level
  • High accuracy, fast response – 0.02% full scale linearity is typical, with no cyclical error or hysteresis
  • Works with any conductive target, material or finish has no effect on accuracy
  • Directly measures the target with super-small sensor heads, eliminating Abbé offset errors
  • Easy installation – sensor head mounts in a simple precision hole
  • Serial communications port for “in machine” calibration High long term stability, essentially zero thermal dissipation from the sensor head (probe)
  • Sensors for high vacuum environments available

Click below to view the datasheet:

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