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Capacitive Position Sensors

Capacitive sensors from MicroSense offer the lowest noise performance of any commercially available capacitive sensor, achieving nanometer and even picometer resolution.  Several types of sensors are available - these "application-specific" capacitive position sensors are optimized for either high stability and linearity or the highest measurement bandwidth for fast response. 

MicroSense capacitive sensors are designed for demanding, real-world applications, especially where the best possible measurement performance is required. The following product selector offers guidance on available sensor types.  Please contact us with your exact requirements, and we'll respond quickly with our recommendation.

Select Product

Microsense

Precision Capacitive Sensor - Model 6810
  • Low noise
  • Non-contact design

Capacitive Position Sensor for Nanopositioning - MicroSense Mini
  • OEM applicationns
  • Non-contacting

Precision Capacitive Position Sensor Model 4810
  • Short range displacement measurement
  • Non-contacting

Precision Capacitive Position Sensor Model 8810
  • High accuracy over short ranges
  • Low noise

Capacitive Displacement Sensor - Model 5810
  • Non-contacting
  • Bandwiths up to 100 kHz

Measurements in Vacuum Environments

Precision position sensors that will operate in high vacuum or Ultra High Vacuum environments must be carefully constructed from materials with low vapour pressures to avoid outgassing. Our supplier MicroSense, has considerable experience in preparing sensors for operation in vacuum environments.

Their probes have been used successfully in Focused Ion Beamsystems, Scanning Electron Microscope systems, Lithography systems and a variety of large experimental physics projects. 

  • Linear position measurement over ranges from 10 micrometres up to 4 mm.
  • Glass-metal probes provide low outgassing and high stability. Probes are small in size to minimize surface area in the vacuum chamber.
  • Vacuum-prepared cylindrical probes use vacuum-compatible materials and adhesives, and offer virtually zero thermal dissipation from the probe.
  • Probes are available with non-magnetic construction.
  • Several styles of chamber wall feedthroughs are offered